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Welcome to Oxford Instruments Plasma Technology Spares Website. 


We offer flexible, configurable process tools and leading-edge processes for the precise, controllable and repeatable engineering of micro- and nano-structures.Our systems provide process solutions for the etching of nanometre sized features, nanolayer deposition and the controlled growth of nanostructures. 
These solutions are based on core technologies in plasma-enhanced deposition and etch, ion-beam deposition and etch, atomic layer deposition, deep silicon etch and physical vapour deposition.Products range from compact stand-alone systems for R&D, through batch tools and up to clustered cassette-to-cassette platforms for high-throughput production processing.

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